An Array waveguide sensor for artificial optical skins

被引:8
|
作者
Missinne, Jeroen [1 ]
Van Steenberge, Geert [1 ]
Van Hoe, Bram [1 ]
Van Coillie, Kristof [1 ]
Van Gijseghem, Tim [2 ]
Dubruel, Peter [2 ]
Vanfleteren, Jan [1 ]
Van Daele, Peter [3 ]
机构
[1] Univ Ghent, IMEC, ELIS Dept, Ctr Microsyst Technol, Technol Pk 914A, B-9052 Zwijnaarde, Belgium
[2] Univ Ghent, Polymer Chem & Biomat Res Grp, B-9000 Ghent, Belgium
[3] Univ Ghent, IMEC, Ctr Microsyst Technol, INTEC Dept, B-9052 Zwijnaarde, Belgium
关键词
artificial optical skin; array waveguide sensor; embossing; polymer waveguides; silicone waveguides;
D O I
10.1117/12.809154
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present a concept for an artificial optical skin, a flexible foil in which a novel type of optical force sensing elements is integrated. The principle relies on the change in coupling between two arrays of crossing polymer waveguides separated by a thin layer of soft silicone. When the exerted pressure is increasing, the distance between the waveguides decreases and consequently power is transmitted from one to another. A process flow to produce a proof of principle demonstrator with arrays of Truemode (TM) waveguides embedded in silicone is described. In a second approach also the waveguides are fabricated in silicone using an embossing technique.
引用
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页数:9
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