Complementary transfer-assisted patterning of high-resolution heterogeneous elements on plastic substrates for flexible electronics

被引:17
|
作者
Choi, Wonsuk [1 ]
Kim, Min-Hoi [1 ]
Na, Yu-Jin [1 ]
Lee, Sin-Doo [1 ]
机构
[1] Seoul Natl Univ, Sch Elect Engn & Comp Sci, Seoul 151600, South Korea
关键词
Complementary transfer-assisted patterning; OTFT; Short-channel; High-resolution patterning; DRIVEN; DISPLAYS;
D O I
10.1016/j.orgel.2010.09.017
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We developed a versatile platform to construct heterogeneous organic and metallic elements with micrometer features on a plastic substrate in a complementary transfer-assisted patterning (CTAP) scheme. The underlying concept relies on a high-resolution transfer-printing process of a sacrificial layer, producing complementary patterns of the elements, in combination with a lift-off technique for removing the sacrificial layer to leave only active patterns on a variety of substrates. No detrimental errors in sequentially defining patterns of both an organic material and a metal are involved during lifting-off the sacrificial layers in multilayer architecture. We demonstrated the generic principle of the CTAP in the fabrication of short-channel organic thin film transistors on glass substrates and organic inverters on plastic substrates for flexible electronics. (C) 2010 Elsevier B. V. All rights reserved.
引用
收藏
页码:2026 / 2031
页数:6
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