Effect of residual acetylene gas on growth of vertically aligned carbon nanotubes

被引：8
|
作者：
Yamaguchi, Masao [1 ]
Pan, Lujun [1 ]
Akita, Seiji [1 ]
Nakayama, Yoshikazu [1 ,2 ]
机构：
[1] Osaka Prefecture Univ, Dept Phys & Elect, Naka Ku, Sakai, Osaka 5998531, Japan
[2] Osaka Univ, Dept Mech Engn, Suita, Osaka 5650871, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2008年 / 47卷 / 04期
关键词：
carbon nanotube; vertically aligned carbon nanotubes; residual gas; CVD; Fe catalyst;
D O I：
10.1143/JJAP.47.1937
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We have investigated the effect of residual reaction gas on the growth of vertically aligned carbon nanotubes (CNTs) synthesized by chemical vapor deposition (CVD). The concentration of acetylene resident in gas lines and a CVD chamber decreased exponentially with time and even a small amount of residual acetylene affects the CNT growth. The residual acetylene reacts with the catalyst particles of Fe and reduces the catalytic activity of Fe particles under the temperature of 500 degrees C. As a result, both the length and bulk density of the grown CNTs decreased with increasing residual acetylene concentration.
引用
收藏
页码：1937 / 1940
页数：4
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