Patterning organic-inorganic thin-film transistors using microcontact printed templates

被引:81
|
作者
Kagan, CR [1 ]
Breen, TL [1 ]
Kosbar, LL [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1063/1.1420576
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the simple, low-cost, and parallel fabrication of patterned organic-inorganic thin-film transistors (TFTs) by microcontact printing a molecular template on the substrate surface prior to film deposition. We printed molecules with hydrophobic tail groups on the gate oxide surfaces of TFTs to chemically, differentiate the substrate surface and confine the self-assembly of thin films, deposited from solutions flooded across the entire surface, to the transistor channels. TFTs are fabricated with good device characteristics and no current leakage. This process is more general to the patterning of other solution-deposited thin-film materials. (C) 2001 American Institute of Physics.
引用
收藏
页码:3536 / 3538
页数:3
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