A new System for Measuring the Diffraction Efficiency of Large Aperture Gratings

被引：0

作者：

Zhou, Xiaowei ^{[1
]}

Wang, Xiao ^{[1
]}

Liu, Zhengkun ^{[1
]}

Xu, Xiangdong ^{[1
]}

Fu, Shaojun ^{[1
]}

机构：

[1] Univ Sci & Technol ChinaChina, Natl Synchrotron Radiat Lab, Hefei, Peoples R China

来源：

5TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: DESIGN, MANUFACTURING, AND TESTING OF MICRO- AND NANO-OPTICAL DEVICES AND SYSTEMS | 2010年 / 7657卷

关键词：

Diffraction efficiency; shutter; double detecor probe; reference grating; SPECTROMETER;

D O I：

10.1117/12.866282

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple and new system for measuring the diffraction efficiency of large aperture gratings at littrow angle is established in this paper. The reference grating Po, double beams and timer with shutter have been draw into the system for eliminating the impact of polarization and stray light, fluctuation of incident light, and the fatigue of photodetector. A program is designed to scan, measure and calculate the diffraction efficiency of the gratings automatically. The diffraction efficiency accuracy measured for the gratings is increased by similar to 1% with this system. To achieve more measured accuracy, additional beam of reflection light should be imported.

引用

页数：7

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