Recent Advances in MEMS Sensor Technology-Thermo-fluid and Electro-magnetic Devices

被引：6
|
作者：
Khoshnoud, Farbod [1 ]
de Silva, Clarence W. [2 ]
机构：
[1] Univ Hertfordshire, Hatfield AL10 9AB, Herts, England
[2] Univ British Columbia, NSERC BC Packers Chair Ind Automat, Vancouver, BC V5Z 1M9, Canada
来源：
IEEE INSTRUMENTATION & MEASUREMENT MAGAZINE | 2012年 / 15卷 / 03期
关键词：
Robot sensing systems; Micromechanical devices; Temperature measurement; Stress measurement; Magnetomechanical effects; Biomedical measurements; Magnetic field measurement; Tutorials; SHEAR-STRESS SENSOR; FABRICATION; DESIGN;
D O I：
10.1109/MIM.2012.6204868
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection. © 2012 IEEE.
引用
收藏
页码：16 / 20
页数：5
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