Growth of highly disordered InGaP on (100) GaAs by molecular beam epitaxy with a GaP decomposition source

被引:17
|
作者
Song, JD [1 ]
Kim, JM [1 ]
Lee, YT [1 ]
机构
[1] Kwangju Inst Sci & Technol, Dept Informat & Commun, Puk Gu, Kwangju 500712, South Korea
来源
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D O I
10.1007/s003390100848
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
High-quality, lattice-matched InGaP on exact (100) GaAs was successfully grown by molecular beam epitaxy with a GaP decomposition source. The ordering parameter (eta) of the InGaP is investigated as a function of the growth temperature. eta is as low as 0.22 and almost insensitive to the growth temperature below 460 degreesC. It increases abruptly around 475 degreesC and has a maximum value of 0.35 at approximate to 490 degreesC. Double crystal X-ray diffraction and a low-temperature photoluminescence spectrum reveal that the present growth method is robust and provides better quality InGaP compared to other state-of-the-art growth technologies.
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页码:625 / 627
页数:3
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