Application of breakthrough failure analysis techniques on 90nm devices with an EOS fail

被引:0
|
作者
Bailon, MF [1 ]
Salinas, PF [1 ]
Arboleda, JS [1 ]
Miranda, JC [1 ]
机构
[1] Intel Technol Philippines Inc, Javalera 4107, Philippines
关键词
D O I
10.1109/IPFA.2005.1469131
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:56 / 58
页数:3
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