Carving fiber-top cantilevers with femtosecond laser micromachining

被引：23
|
作者：
Said, A. A. [1 ]
Dugan, M. [1 ]
de Man, S. [2 ]
Iannuzzi, D. [2 ]
机构：
[1] Translume Inc, Ann Arbor, MI USA
[2] Vrije Univ Amsterdam, Dept Phys & Astron, Fac Sci, Amsterdam, Netherlands
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2008年 / 18卷 / 03期
关键词：
D O I：
10.1088/0960-1317/18/3/035005
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present a new fabrication method to carve fiber-top cantilevers from single-mode optical fibers. The procedure, which is entirely based on a two-step femtosecond laser micromachining technique, is faster and more convenient with respect to what has been reported so far in the literature, and should be well adaptable to automatization and, thus, to series production.
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页数：4
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