Monolithic Silicon Optocouplers for Bio-Chemical Sensing

被引:2
|
作者
Misiakos, Kostantinos [1 ]
机构
[1] NCSR Demokritos, Inst Microelect, Athens 15310, Greece
来源
EUROSENSORS XXV | 2011年 / 25卷
关键词
OPTOELECTRONIC TRANSDUCER; BIOSENSOR;
D O I
10.1016/j.proeng.2011.12.038
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
In this work a monolithic silicon optocoupler platform for bio-chemical sensing is presented. The uniqueness of the platform relies on its radical design that integrates all passive and active elements of an optical transducer on a single silicon chip fabricated with standard microfabrication techniques. The versatility of the platform has led to three different embodiments for various detection schemes and bio-chemical sensing applications that apart from the low detection limits offer the advantage of multi-analyte multiplexed label-free determinations. The presented platform - fully- CMOS-compatible and unique in its kind-can pave the way for truly portable, low-cost optical biochemical sensors. (C) 2011 Published by Elsevier Ltd.
引用
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页数:4
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