Forces applied to nanoparticles in magnetron discharges and the resulting size segregation

被引：1

作者：

Arnas, C. ^{[1
]}

Guidez, T. ^{[1
,2
]}

Chami, A. ^{[1
]}

Mun, J. H. ^{[1
,3
]}

Couedel, L. ^{[3
]}

机构：

[1] Aix Marseille Univ, PIIM, CNRS, F-13397 Marseille, France

[2] Ecole Cent Marseille, 38 Rue Joliot Curie, F-13013 Marseille, France

[3] Univ Saskatchewan, Dept Phys & Engn Phys, Saskatoon, SK S7N 5E2, Canada

来源：

PHYSICS OF PLASMAS | 2022年 / 29卷 / 07期

关键词：

DUST PARTICLES; OPTICAL-PROPERTIES; PLASMA; TRANSPORT; DRIFT; GAS; THERMOPHORESIS; PARTICULATE; PROBE;

D O I：

10.1063/5.0095103

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

Two-dimensional measurements of magnetron discharge plasma parameters are used to calculate the forces applied to an isolated nanoparticle in conditions where nanoparticles are produced from cathode sputtering. Plasma spatial inhomogeneities, which are specific to magnetron discharges, also induce inhomogeneities in the charging mechanism and applied forces. It is shown that the nanoparticle transport is due to electric, thermophoretic and ion drag forces, and that the dominant one proportional to the nanoparticle size varies according to position. For a given plasma, these spatial differences explain the segregation of size in the nanoparticle deposits, which are observed inside the device. Published under an exclusive license by AIP Publishing.

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页数：9

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