High Frequency Piezoelectric Micromachined Transducers with Wide Bandwidth and High Sensitivity

被引：0
|
作者：
Nistorica, Corina [1 ]
Latev, Dimitre [1 ]
Sano, Takahiro [2 ]
Xu, Liuyi [1 ]
Imai, Darren [1 ]
机构：
[1] FUJIFILM Dimatix Inc, Santa Clara, CA 95050 USA
[2] FUJIFILM Corp, Kaisei, Japan
来源：
2019 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2019年
关键词：
PMUT; MEMS; PNZT; piezoelectric; ultrasound; MATCHING NETWORK;
D O I：
10.1109/ultsym.2019.8925804
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Recent advances in microfabrication and piezoelectric thin film deposition have made possible the fabrication of micromachined ultrasound transducers that can compete in performance with the traditional bulk piezoelectric transducers. In this paper we report a piezoelectric micromachined transducer (PMUT) with 128 elements, a center frequency of 12MHz, a bandwidth of 105% and a sensitivity of -56dB at 15 mm from transducer. Design, characterization, matching circuit and ultrasound images acquired with the PMUT device are described in this work.
引用
收藏
页码：1088 / 1091
页数：4
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