Fabrication and Characterization of Flexible Capacitive Humidity Sensors Based on Graphene Oxide on Porous PTFE Substrates

被引：10

作者：

Wei, Zhenyu ^{[1
]}

Huang, Jianqiu ^{[1
]}

Chen, Wenhao ^{[1
]}

Huang, Qingan ^{[1
]}

机构：

[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Peoples R China

来源：

SENSORS | 2021年 / 21卷 / 15期

基金：

中国国家自然科学基金;

关键词：

humidity sensor; flexibility substrate; polytetrafluoroethylene (PTFE); hydrophobic; POLYTETRAFLUOROETHYLENE; ELECTRODES; REDUCTION;

D O I：

10.3390/s21155118

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Porous polytetrafluoroethylene (PTFE) is physically flexible, thermally and chemically stable, relatively inexpensive, and commercially available. It is attractive for various flexible sensors. This paper has studied flexible capacitive humidity sensors fabricated on porous PTFE substrates. Graphene oxide (GO) was used as a sensing material, both hydrophobic and hydrophilic porous PTFE as the substrates, and interdigitated electrodes on the PTFE substrates were screen-printed. SEM and Raman spectrum were utilized to characterize GO and PTFE. An ethanol soak process is developed to increase the yield of the humidity sensors based on hydrophobic porous PTFE substrates. Static and dynamic properties of these sensors are tested and analyzed. It demonstrates that the flexible capacitive humidity sensors fabricated on the ethanol-treated hydrophobic PTFE exhibit high sensitivity, small hysteresis, and fast response/recovery time.

引用

页数：14

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