Cluster ion-solid interactions from meV to MeV energies

被引：32

作者：

Nordlund, K. ^{[1
]}

Jaervi, T. T. ^{[1
]}

Meinander, K. ^{[1
]}

Samela, J. ^{[1
]}

机构：

[1] Univ Helsinki, Dept Phys, FIN-00014 Helsinki, Finland

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 2008年 / 91卷 / 04期

关键词：

D O I：

10.1007/s00339-008-4514-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The nature of cluster ion-surface interactions changes dramatically with the kinetic energy and mass of the incoming cluster species. In this article we review some recent work on the nature of cluster-surface interactions spanning an energy range from a few tens of meV/atom to several MeV/cluster and cluster sizes in the range of 1-300000 atoms/cluster. We describe five possible distinct outcomes of a single cluster impact event: (i) deposition into a non-epitaxial configuration, (ii) deposition into an epitaxial configuration, (iii) crater formation by liquid flow, (iv) crater formation by hydrostatic pressure, (v) implantation.

引用

页码：561 / 566

页数：6

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