Development of Vacuum Ultraviolet Emission Source Using a Cone-Shaped O2/He Hollow Cathode Discharge

被引：4
|
作者：
Han, Duksun [1 ]
Moon, Se Youn [1 ,2 ]
机构：
[1] Chonbuk Natl Univ, Inst Plasma Applicat, 567 Baekje Daero, Jeonju 54896, South Korea
[2] Chonbuk Natl Univ, Dept Quantum Syst Engn, 567 Baekje Daero, Jeonju 54896, South Korea
来源：
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2017年 / 17卷 / 11期
基金：
新加坡国家研究基金会;
关键词：
VUV Spectroscopy; Absorption Spectroscopy; VUV Lamp; Oxygen Radical Density; ABSORPTION-SPECTROSCOPY; ELECTRON-TEMPERATURE; PLASMA; DENSITY;
D O I：
10.1166/jnn.2017.15172
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
A compact vacuum ultraviolet (VUV) lamp using helium and oxygen plasma has been developed to emit atomic oxygen triplet S-3(1)-P-3(2, 1, 0) lines, which can be applied to measure absolute oxygen density by a method of absorption spectroscopy. The VUV lamp consists of a negatively biased micro-hollow cathode with a hole of 700 mu m diameter and grounded hole-electrode carrying the gasses. The discharge was confined in the hollow cathode hole when the operating pressure was near 30 Torr in both the pure helium and helium based oxygen diluted plasma. In this condition, the spectral lines of the atomic oxygen triplet emission (130.2, 130.5, 130.6 nm) were observed and the atomic excitation temperature showed higher value than that of a normal glow phase. Typical I-V characteristic of hollow cathode mode such as negative resistivity was also discussed in both the helium and helium-oxygen discharge at the pressure of 30 Torr.
引用
收藏
页码：8480 / 8484
页数：5
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