Characterization and optimization of ZnO films for SAW devices

被引：0

作者：

Sayago, I ^{[1
]}

Aleixandre, M ^{[1
]}

Ferndádez, MJ ^{[1
]}

Fontecha, JL ^{[1
]}

Arés, L ^{[1
]}

Gutiérrez, FJ ^{[1
]}

Gracià, I ^{[1
]}

Horrillo, MC ^{[1
]}

机构：

[1] CSIC, IFA, Lab Sensores, Madrid 28006, Spain

来源：

2005 Spanish Conference on Electron Devices, Proceedings | 2005年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The piezoelectric characteristics of ZnO films obtained by RF magnetron sputtering in reactive plasma have been researched. ZnO films have been grown on SiO2/Si (100) substrate using a zinc oxide target. Different RF power and reactive plasma have been tested to obtain a good piezoelectric material for SAW applications. Crystalline structures and morphological characteristics of the films were investigated by X-Ray diffraction (XRD) and atomic force microscopy (AFM) respectively. "Al/ZnO/SiO2-Si" configuration SAW devices were fabricated and characterized by frequency response measurements.

引用

页码：509 / 511

页数：3

共 50 条

[1] ZnO thin films for high frequency SAW devices
Ieki, H
Kadota, M
1999 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 1999, : 281 - 289
[2] Characterization of ZnO/DLC/Si saw devices using FCVA-produced DLC films
Lee, MH
Chang, SM
Park, CK
Lee, JB
Park, JS
PROCEEDINGS OF THE 2002 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM & PDA EXHIBITION, 2002, : 70 - 73
[3] Effects of lattice mismatches in ZnO/substrate structures on the orientations of ZnO films and characteristics of SAW devices
Lee, JB
Lee, MH
Park, CK
Park, JS
THIN SOLID FILMS, 2004, 447 : 296 - 301
[4] Development of ZnO thin films for SAW devices by the ultrasonic spray pyrolysis technique
Kyungpook Natl Univ, Taegu, Korea, Republic of
Proc IEEE Ultrason Symp, (323-326):
[5] Development of ZnO thin films for SAW devices by the ultrasonic spray pyrolysis technique
Kim, H
Lee, Y
Roh, Y
Jung, J
Lee, M
Kwon, H
1998 IEEE ULTRASONICS SYMPOSIUM - PROCEEDINGS, VOLS 1 AND 2, 1998, : 323 - 326
[6] CHARACTERIZATION AND CHEMICAL SENSOR APPLICATIONS OF MONOLAYER FILMS USING SAW DEVICES
RICCO, AJ
KEPLEY, LJ
THOMAS, RC
SUN, L
CROOKS, RM
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1992, 204 : 160 - COLL
[7] TUNABLE ZNO-SI SAW DEVICES USING MAGNETOSTRICTIVE THIN-FILMS
ALTAN, B
ROBBINS, WP
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1982, 29 (03): : 197 - 197
[8] ZNO THIN-FILM SAW DEVICES
YAMAZAKI, O
MITSUYU, T
WASA, K
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1980, 27 (06): : 369 - 379
[9] Characterization of ZnO/diamond SAW devices elaborated on the smooth nucleation side of MPACVD diamond
Le Brizoual, L
Lamara, T
Sarry, F
Belmahi, M
Elmazria, O
Bougdira, J
Remy, M
Alnot, P
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2005, 202 (11): : 2217 - 2223
[10] Fabrication of SAW devices with dual mode frequency response using AlN and ZnO thin films
Shih, Wei-Che
Chen, Ying-Chung
Peng, Guan-Ting
Kao, Kuo-Sheng
Cheng, Chien-Chuan
Chang, Wei-Tsai
2016 INTERNATIONAL SYMPOSIUM ON COMPUTER, CONSUMER AND CONTROL (IS3C), 2016, : 618 - 621

← 1 2 3 4 5 →