Fizeau interferometry with automated fringe pattern analysis using temporal and spatial phase shifting

被引：0
|
作者：
Styk, Adam [1 ]
Patorski, Krzysztof [1 ]
机构：
[1] Inst Micromech & Photon, 8 Sw A Boboli St, PL-02525 Warsaw, Poland
来源：
RECENT ADVANCES IN MECHATRONICS | 2007年
关键词：
D O I：
10.1007/978-3-540-73956-2_134
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
The paper presents a novel approach to measure the parameters of quasi-parallel plates in a Fizeau interferometer. The beams reflected from the front and rear surfaces lead to a complicated interferogram intensity distribution. The phase shifting techniques (temporal and spatial) are proposed to process the interferograms and obtain a two-beam-like fringe pattern encoding the plate thickness variations. Further pattern processing is conducted using the Vortex transform.
引用
收藏
页码：684 / +
页数：3
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