Growth of MgTiO3 thin films by pulsed laser deposition and their electrical properties

被引：9
|
作者：
Kang, S [1 ]
Lim, W [1 ]
Lee, J [1 ]
机构：
[1] Sungkyunkwan Univ, Dept Mat Engn, Suwon 440746, South Korea
来源：
INTEGRATED FERROELECTRICS | 2000年 / 31卷 / 1-4期
关键词：
MgTiO3; pulsed laser deposition; thin films; microwave;
D O I：
10.1080/10584580008215644
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
MgTiO3 thin films have been grown on various substrates by pulsed laser deposition (PLD) to investigate the application for microwave dielectrics and optical devices. Highly oriented MgTiO3 thin films were obtained on sapphire (c-plane Al2O3) MgTiO3 thin films deposited on SiO2/Si and platinized silicon (Pt/Ti/SiO2/Si) substrates were polycrystalline nature. MgTiO(3)thin films grown on sapphire were transparent in the visible and had a sharp absorption edge at 280 nm. These MgTiO3 thin films had extremely fine feature of surface morphology, i.e., rms roughness of 0.87 nm. Dielectric constant and loss of MgTiO3 thin films deposited by PLD were about 24 and 1.5% at 1MHz, respectively. These MgTiO3 thin films also exhibited little dielectric dispersion.
引用
收藏
页码：97 / 104
页数：8
相关论文
共 50 条
  • [41] Growth of Ti:sapphire thin films by pulsed laser deposition
    Gonzalo, J
    Key, PH
    Schmidt, MJJ
    LASER PHYSICS, 1998, 8 (01) : 265 - 269
  • [42] Growth of ZrSnTiO thin films by pulsed-laser deposition
    Nistor, M.
    Ioachim, A.
    Gallas, B.
    Defourneau, D.
    Perriere, J.
    Seiler, W.
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2007, 19 (09)
  • [43] On the growth mechanisms of thin films produced by pulsed laser deposition
    McKinnon, J
    Ionescu, M
    Shi, DQ
    Dou, SX
    ADVANCES IN CRYOGENIC ENGINEERING, VOLS 48A AND B, 2002, 614 : 547 - 554
  • [44] The growth of zinc phthalocyanine thin films by pulsed laser deposition
    Michal Novotný
    Jakub Šebera
    Amina Bensalah-Ledoux
    Stephan Guy
    Jiří Bulíř
    Přemysl Fitl
    Jan Vlček
    Dominika Zákutná
    Eva Marešová
    Pavel Hubík
    Irena Kratochvílová
    Martin Vrňata
    Ján Lančok
    Journal of Materials Research, 2016, 31 : 163 - 172
  • [45] Multitarget system for growth of thin films by pulsed laser deposition
    Herrera, M
    Castro-Rodríguez, R
    Gómez, O
    Rejon, V
    Bartolo-Pérez, P
    Barkun, S
    Martel, A
    Peña, JL
    REVISTA MEXICANA DE FISICA, 2002, 48 (01) : 61 - 66
  • [46] Advances in the growth of SrS thin films by pulsed laser deposition
    Pique, A
    Auyeung, RCY
    Chrisey, DB
    Justus, B
    Huston, A
    Revay, RE
    Frazier, B
    FLAT-PANEL DISPLAY MATERIALS-1998, 1998, 508 : 295 - 300
  • [47] Advances in Pulsed Laser Deposition growth of nitride thin films
    Fernández, FE
    Pumarol, M
    Martínez, A
    Jia, WY
    Wang, YY
    Rodríguez, E
    Mourad, HA
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING IV, 1999, 3618 : 475 - 486
  • [48] The epitaxial growth and optical properties of ZnS thin films, deposited by pulsed laser deposition
    Chung, J-K
    Kim, W-J
    Kim, S. S.
    Song, T. K.
    Park, S-Y
    Lee, T. K.
    Kim, C. J.
    PHYSICA SCRIPTA, 2010, T139
  • [49] ELECTRICAL PROPERTIES OF PENTACENE FILMS OBTAINED BY PULSED LASER DEPOSITION
    Wisz, G.
    Virt, I.
    Kuzma, M.
    Sagan, P.
    Gorbach, T. Ya.
    Smertenko, P. S.
    REVIEWS ON ADVANCED MATERIALS SCIENCE, 2010, 23 (02) : 229 - 233
  • [50] Structural, optical, dielectric and electrical studies on RF sputtered nanocrystalline Zr doped MgTiO3 thin films
    Gogoi, Pallabi
    Kumar, T. Santhosh
    Sharma, Pramod
    Pamu, D.
    JOURNAL OF ALLOYS AND COMPOUNDS, 2015, 619 : 527 - 537
12345