Modeling of the Photoelectric-Thermoelectric Integrated Micropower Generator

被引:5
|
作者
Sun, Min [1 ]
Liao, Xiaoping [1 ]
机构
[1] Southeast Univ, Minist Educ, Key Lab MEMS, Nanjing 210096, Peoples R China
基金
中国国家自然科学基金;
关键词
Harvester; integrated power generator; microelectro-mechanical system (MEMS); modeling; photoelectric; thermoelectric; POWER GENERATOR; DESIGN;
D O I
10.1109/TED.2021.3095050
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Modeling of the photoelectric and thermoelectric integrated micropower generator is proposed in this article. This generator consists of a photoelectric generator and a microthermoelectric generator that can harvest optical and thermal energy at the same time. Photoelectric generator in this design is composed of several parallel p-n junctions on silicon substrate with Poly-Si electrodes above to receive light from both the top and the bottom sides of the chip. In order to take the advantage of CMOS process and integrate with the photoelectric generator, themicrothermo-electric generator is designed to be hybrid and composed of series-wound thermocouples. The proposed model is based on the photovoltaic effect and the Seebeck effect. According to the results of the experiments, when light is received from the top side of the chip, the efficiency of the photoelectric generator is 4.11% and it is 0.5% when the bottom side is chosen to receive light. Geometry of the thermocouples dominates the performance of the microthermoelectric generator in this design. When the length and the width of the thermal legs are 75 and 20 mu m, respectively, the microthermoelectric generator has the experimental output voltage factor of 0.316 Vcm(-2)K(-1). The measured maximum output power factor of the microthermoelectric generator is 6.34 x 10(-3) mu Wcm(-2)K(-2).
引用
收藏
页码:4509 / 4515
页数:7
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