Fabrication of a 3D nano-printing device

被引：0
|
作者：
Hong, Jinseo [1 ]
Masuda, Yusuke [1 ]
Mineta, Takashi [1 ]
机构：
[1] Yamagata Univ, 4-3-16 Jonan, Yonezawa, Yamagata 9928510, Japan
来源：
NANO-, BIO-, INFO-TECH SENSORS, AND 3D SYSTEMS II | 2018年 / 10597卷
关键词：
MEMS; Nano-printing; AFM; Hollow cantilever; Micro-nozzle;
D O I：
10.1117/12.2317917
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
In this paper, we demonstrate fabrication processes of dual atomic force microscopic (AFM) probe with embedded micro-channels and a nozzle hole for liquid delivering function for 3D printing in nano-scale. The nozzle and embedded micro-channels were successfully fabricated with under-surface connection and hydrophilic inner walls. The narrow trench opening remained above the micro-channel, was completely sealed by combination of Si thermal oxidation and subsequent SiO2 sputtering deposition. Twin Si tips with an outlet nozzle hole and embedded micro-channel were fabricated with the developed fabrication process.
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页数：6
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