p-type InGaN cap layer for normally off operation in AlGaN/GaN heterojunction field effect transistors

被引:18
|
作者
Shimizu, Mitsuaki [1 ]
Piao, Guaxi [1 ]
Inada, Masaki [1 ]
Yagi, Syuichi [1 ]
Yano, Yoshiki [1 ,2 ]
Akutsu, Nakao [1 ,2 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan
[2] Taiyo Nippon Sanso Corp, Tsukuba Lab, Tsukuba, Ibaraki 3002611, Japan
关键词
AlGaN/GaN heterojunction field effect transistor; p-InGaN cap layer; normally off operation;
D O I
10.1143/JJAP.47.2817
中图分类号
O59 [应用物理学];
学科分类号
摘要
The normally off operation of AlGaN/GaN heterojunction field effect transistor (HFET) devices with a p-type InGaN cap layer under a gate electrode was demonstrated. The threshold gate voltage V-Gth was 0.5 V, and the maximum transconductance g(m) was about 120 mS/mm. The maximum drain current I-Dmax was more than 2 10 mA/mm. RF characteristics were also measured, and it was found that f(T) is 2.1 GHz and f(max) is 6.4 GHz when the gate length is 2 mu m.
引用
下载
收藏
页码:2817 / 2819
页数:3
相关论文
共 50 条
  • [41] Cubic AlGaN/GaN Hetero-Junction Field-Effect Transistors with Normally-on and Normally-off Characteristics
    Tschumak, E.
    2010 WIDE BANDGAP CUBIC SEMICONDUCTORS: FROM GROWTH TO DEVICES, 2010, 1292 : 159 - 164
  • [42] Synthesis and characterization of p-type NiO films suitable for normally-off AlGaN/GaN HFETs application
    Li, Liuan
    Wang, Wenjing
    He, Mang
    Zhang, Jialin
    Wu, Zhisheng
    Zhang, Baijun
    Liu, Yang
    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2017, 67 : 141 - 146
  • [43] Effect of electromechanical coupling on the strain in AlGaN/GaN heterojunction field effect transistors
    Jogai, B. (brahmanand.jogai@wpafb.af.mil), 1600, American Institute of Physics Inc. (94):
  • [44] Effect of electromechanical coupling on the strain in AlGaN/GaN heterojunction field effect transistors
    Jogai, B
    Albrecht, JD
    Pan, E
    JOURNAL OF APPLIED PHYSICS, 2003, 94 (06) : 3984 - 3989
  • [45] High Power Normally-OFF GaN/AlGaN HEMT with Regrown p Type GaN
    Rolland, Gwen
    Rodriguez, Christophe
    Gomme, Guillaume
    Boucherif, Abderrahim
    Chakroun, Ahmed
    Bouchilaoun, Meriem
    Pepin, Marie Clara
    El Hamidi, Faissal
    Maher, Soundos
    Ares, Richard
    MacElwee, Tom
    Maher, Hassan
    ENERGIES, 2021, 14 (19)
  • [46] SiGe heterojunction vertical p-type metal-oxide-semiconductor field-effect transistors with Si cap
    Chen, XD
    Ouyang, Q
    Onsongo, DM
    Jayanarayanan, SK
    Tasch, A
    Banerjee, S
    APPLIED PHYSICS LETTERS, 2000, 77 (11) : 1656 - 1658
  • [47] Optimization of p-type AlGaN/GaN and GaN/InGaN superlattice design for enhanced vertical transport
    Kauser, MZ
    Osinsky, A
    Dong, JW
    Hertog, B
    Dabiran, A
    Chow, PP
    GaN, AIN, InN and Their Alloys, 2005, 831 : 239 - 244
  • [48] Gate leakage mechanisms in normally off p-GaN/AlGaN/GaN high electron mobility transistors
    Xu, Ning
    Hao, Ronghui
    Chen, Fu
    Zhang, Xiaodong
    Zhang, Hui
    Zhang, Peipei
    Ding, Xiaoyu
    Song, Liang
    Yu, Guohao
    Cheng, Kai
    Cai, Yong
    Zhang, Baoshun
    APPLIED PHYSICS LETTERS, 2018, 113 (15)
  • [49] Normally Off AlGaN/GaN Metal-2DEG Tunnel-Junction Field-Effect Transistors
    Yuan, Li
    Chen, Hongwei
    Chen, Kevin J.
    IEEE ELECTRON DEVICE LETTERS, 2011, 32 (03) : 303 - 305
  • [50] Growth of AlGaN/GaN heterojunction field effect transistors on semi-insulating GaN using an AlGaN interlayer
    Chen, Z.
    Pei, Y.
    Newman, S.
    Chu, R.
    Brown, D.
    Chung, R.
    Keller, S.
    Denbaars, S. P.
    Nakamura, S.
    Mishra, U. K.
    APPLIED PHYSICS LETTERS, 2009, 94 (11)