Design of a bulk-micromachined piezoelectric accelerometer

被引：3
|
作者：
Yang, Hui [1 ]
Guo, Hang [1 ]
机构：
[1] Xiamen Univ, Pen Tung Sah MEMS Res Ctr, Xiamen, Peoples R China
来源：
2007 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1-6 | 2007年
关键词：
MEMS; bulk-micromachining; piezoelectric inicroaccelerometer; zinc oxide;
D O I：
10.1109/ULTSYM.2007.654
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
A bulk-micromachined piezoelectric accelerometer is proposed and designed, in which the bulk-micromachined silicon seismic mass is suspended by the cantilevers and part of cantilever is covered with ZnO piezoelectric thin film. In this paper, we first derive the one-dimensional analytical model of the piezoelectric cantilever to study the factors affecting the sensitivity of the accelerometer, and then design the piezoelectric accelerometers with straight and folded cantilever structures. Totally, 12 different structures of the microaccelemeter are investigated. The results show that this type of bulk-micromachined piezoelectric accelerometer can own high sensitivity and wide working range to meet requirement of some applications in aerospace and mechanical shock inspection for vehicles.
引用
收藏
页码：2598 / 2601
页数：4
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