Fabrication of High Aspect Ratio SU-8 Microstructures on Piezoelectric Transducers

被引：0
|
作者：
Ramakrishnan, N. [1 ]
Nemade, Harshal B. [2 ]
Palathinkal, Roy Paily [3 ]
机构：
[1] Monash Univ, Sch Engn, Sunway Campus, Bandar Sunway 46150, Malaysia
[2] Ctr Nanotechnol, Gauhati 781039, India
[3] Indian Inst Technol, Dept Elect & Commun Engn, Gauhati 781039, India
来源：
MECHANICAL AND AEROSPACE ENGINEERING, PTS 1-7 | 2012年 / 110-116卷
关键词：
SU-8; fabrication; MEMS; Microstructures; Piezoelectric Transducers; SAW Devices;
D O I：
10.4028/www.scientific.net/AMM.110-116.3127
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
A methodology to fabricate high aspect ratio (HAR) SU-8 micro structures on piezoelectric and metallic substrates is presented. In this work, several fabrication trials were carried out to optimize the SU-8 fabrication process. The fabrication recipe mentioned in the SU-8 (Microchem, USA) datasheet is employed for the initial fabrication trials. The SU-8 structures (micropillars) fabricated during these trials resulted in poor bonding with the surface of piezoelectric substrate. In the later trials a thin film of OmniCoat (Microchem, USA) is coated over the substrate before coating the SU-8 film to improve the adhesion quality of the SU-8 micropillars to the substrate. The fabrication methodology used during the trails and results on the quality of the fabricated HAR SU-8 pillars are discussed in the paper.
引用
收藏
页码：3127 / +
页数：2
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