Design and Fabrication of Integrated Cryogenic Current Comparators

被引：0

作者：

Maezawa, Masaaki ^{[1
]}

Urano, Chiharu ^{[1
]}

Maruyama, Michitaka ^{[1
]}

Yamada, Takahiro ^{[1
]}

Oe, Takehiko ^{[1
]}

Hidaka, Mutsuo ^{[2
]}

Satoh, Tetsuro ^{[2
]}

Nagasawa, Shuichi ^{[2
]}

Hinode, Kenji ^{[2
]}

Kiryu, Shogo ^{[3
]}

Kaneko, Nobu-hisa ^{[1
]}

机构：

[1] Natl Inst Adv Ind Sci & Technol, Tsukuba, Ibaraki 3058568, Japan

[2] Int Superconduct Technol Ctr, Superconduct Res Lab, Tsukuba, Ibaraki 3058568, Japan

[3] Tokyo City Univ, Setagaya Ku, Tokyo 1588557, Japan

来源：

IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY | 2011年 / 21卷 / 03期

关键词：

CCC; current comparators; current multiplier; QHR; standards; superconducting integrated circuits; METROLOGY; TRIANGLE;

D O I：

10.1109/TASC.2010.2090320

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A cryogenic current comparator (CCC) is an instrument of great importance in electrical metrology, which provides a ratio of two currents with ultimate accuracy based on superconductivity. It is used for dc resistance calibration in many national metrology institutes. Conventional CCCs consist of multi-turn coils of wire windings, a multi-layered shield of superconductor foils and a separate SQUID sensor. This implementation results in a bulky device too massive to cool with a mechanical cryocooler, making a system inconvenient. A new implementation of CCC, an integrated CCC (ICCC) consisting of thin-film spiral coils, a thin-film superconducting shield and a SQUID sensor integrated on a single chip, enables a user-friendly system operated with a compact cryocooler. Prototype ICCC chips were designed and fabricated by using a superconducting Nb integrated circuit technology with chemical-mechanical polishing. The basic operation of the prototype ICCCs was confirmed by monitoring periodic flux-voltage characteristics of the SQUIDs.

引用

页码：728 / 733

页数：6

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