共 50 条
- [25] Reflectivity test of X-ray mirrors for deep X-ray lithography Microsystem Technologies, 2008, 14 : 1299 - 1303
- [26] FABRICATION OF CARBON MEMBRANE X-RAY MASK FOR X-RAY LITHOGRAPHY PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION (IMECE 2010), VOL 10, 2012, : 279 - 283
- [27] Reflectivity test of X-ray mirrors for deep X-ray lithography MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, 2008, 14 (9-11): : 1299 - 1303
- [29] Fabrication of x-ray lithography masks with optical lithography JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1996, 14 (06): : 4345 - 4349
- [30] Fabrication of x-ray lithography masks with optical lithography Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena, 1996, 14 (06):