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Cornell Univ, Mat Sci & Engn, Bard Hall, Ithaca, NY 14853 USA
JSR Corp, Lithog Solut Lab, Fine Elect Mat Res Labs, 100 Kawajiri Cho, Yokaichi, Mie 5108552, Japan Cornell Univ, Mat Sci & Engn, Bard Hall, Ithaca, NY 14853 USA