X-ray photoelectron spectroscopic study of surface modification of silk under UV-irradiation

被引:0
|
作者
Uchida, Y [1 ]
Fukuda, T [1 ]
Yanazawa, H [1 ]
机构
[1] Assoc Super Adv Elect Technol, Enviornm Proc Technol Lab, Totsuka Ku, Yokohama, Kanagawa 2440817, Japan
来源
THIN FILM MATERIALS, PROCESSES, AND RELIABILITY: PLASMA PROCESSING FOR THE 100 NM NODE AND COPPER INTERCONNECTS WITH LOW-K INTER-LEVEL DIELECTRIC FILMS | 2003年 / 2003卷 / 13期
关键词
D O I
暂无
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
X-ray photoelectron spectroscopy was used to investigate the surface modification of SiLK* resin (*Trademark of the Dow Chemical Company) to improve its adhesion to metal. Irradiation with UV light (lambda = 172 nm) was found to be an effective method of restructuring the bonds of the surface atoms of SiLK*. That is, it easily breaks carbon bonds and produces active atomic oxygen from even trace amounts of oxygen in the atmosphere. The unbonded carbon then combines with the atomic oxygen, and some of the carbon may desorb in the form of CO and CO2. When Ta is deposited on as-prepared SiLK*, it readily reacts with the carbon on the surface of the SiLK*. However, modification of the surface of the SiLK* by UV irradiation before deposition of the Ta inhibits the reaction between carbon and Ta, resulting in the formation of a more metal-like Ta layer.
引用
收藏
页码:231 / 236
页数:6
相关论文
共 50 条
  • [41] An X-ray photoelectron spectroscopic study of novel SiON glasses
    R. Franke
    C. Girgenrath
    S. Kohn
    M. Jansen
    Fresenius' Journal of Analytical Chemistry, 1998, 361 : 587 - 590
  • [42] X-ray photoelectron spectroscopic study of InGaAsN grown by MOCVD
    Chang, W
    Lin, J
    Zhou, W
    Chua, SJ
    Liu, YJ
    Wee, ATS
    LEOS 2001: 14TH ANNUAL MEETING OF THE IEEE LASERS & ELECTRO-OPTICS SOCIETY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 624 - 625
  • [43] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDIES OF SURFACE OXIDATION OF GADOLINIUM AND YTTERBIUM
    AYYOOB, M
    SARMA, DD
    INDIAN JOURNAL OF CHEMISTRY SECTION A-INORGANIC BIO-INORGANIC PHYSICAL THEORETICAL & ANALYTICAL CHEMISTRY, 1983, 22 (09): : 731 - 735
  • [44] DISSOLUTION AND PASSIVATION OF NICKEL - X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY
    DICKINSON, T
    POVEY, AF
    SHERWOOD, PMA
    JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1977, 73 : 327 - 343
  • [45] AN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF SOME AMMONIUM URANATES
    PAUL, AJ
    SHERWOOD, PMA
    APPLIED SPECTROSCOPY, 1986, 40 (04) : 519 - 525
  • [46] X-ray photoelectron spectroscopic study of petroleum fuel cokes
    Mateos, JMJ
    Fierro, JLG
    SURFACE AND INTERFACE ANALYSIS, 1996, 24 (04) : 223 - 236
  • [47] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF CHROMIUM SORBED ON MONTMORILLONITE
    SUNDER, S
    OSCARSON, DW
    MILLER, NH
    DUBBIN, WE
    GOH, TB
    CANADIAN JOURNAL OF APPLIED SPECTROSCOPY, 1995, 40 (02): : 31 - 35
  • [48] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF HYDRATED ALUMINAS AND ALUMINAS
    TSUCHIDA, T
    TAKAHASHI, H
    JOURNAL OF MATERIALS RESEARCH, 1994, 9 (11) : 2919 - 2924
  • [49] X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY OF IRON RUTHENIUM SYSTEMS
    CHUDINOV, MG
    ALEKSEEV, AM
    DMITRENKO, LM
    PEROV, VM
    NAZAROVA, IG
    KINETICS AND CATALYSIS, 1988, 29 (04) : 780 - 784
  • [50] ALUMINUM POLYESTER CORROSION - AN X-RAY PHOTOELECTRON SPECTROSCOPIC STUDY
    CHTAIB, M
    NOVIS, Y
    CAUDANO, R
    LUTGEN, P
    FEYDER, G
    ACS SYMPOSIUM SERIES, 1990, 440 : 288 - 296