Drastic Suppression of the 1/f Noise in MOSFETs: Fundamental Fluctuations of Mobility Rather Than Induced Mobility Fluctuations

被引:0
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作者
Gaubert, Philippe [1 ]
Teramoto, Akinobu [2 ]
Sugawa, Shigetoshi [1 ]
机构
[1] Tohoku Univ, Grad Sch Engn, Sendai, Miyagi 9808579, Japan
[2] Tohoku Univ, New Ind Creat Hatchery Ctr, Sendai, Miyagi 9808579, Japan
关键词
Low Frequency Noise; Accumulation Mode; Salicide; Metal-Oxide-Semiconductor; Silicon; Oxide Charge Fluctuations; Induced Mobility Fluctuations; Hooge Theory; Plasma Process; LOW-FREQUENCY NOISE; MOS-TRANSISTORS; P-MOSFETS; IMPACT; DEVICES;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A significant reduction of the 1/f noise level has been achieved by the means of a new Metal-Oxide-Semiconductor (MOS) structure and new fabrication processes, opening new horizons for future Very large Scale Integration (VLSI) technology. Furthermore, on account of these investigations, the study of the 1/f noise has been made possible at high drain current. While we might have thought that the 1/f noise could be explained in term of oxide charge and induced mobility fluctuations, the study within this specific operating range revealed the ineffectiveness of the induced mobility fluctuations to accurately model the noise. Instead, better modeling has been achieved through the use of the fundamental fluctuations of mobility of the Hooge theory testifying in favor of the oxide charge and fundamental fluctuations of mobility to explain the 1/f noise in our MOSFETs.
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页数:6
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