Influence of substrate temperature and vacuum annealing on the structural properties of CdTe(111)/Si(100) thin films

被引：0

作者：

Yao, Zhaohui ^{[1
,2
]}

Chen, Tingjin ^{[1
]}

Xia, Chaofeng ^{[1
]}

Yuan, Hairong ^{[1
]}

Li, Jingtian ^{[1
]}

Liao, Hua ^{[1
]}

Liu, Zuming ^{[1
]}

机构：

[1] Yunnan Normal Univ, Solar Energy Res Inst, Kunming 650092, Peoples R China

[2] China Agr Univ, Coll Hydraul & Civil Engn, Beijing 10083, Peoples R China

来源：

PROCEEDINGS OF ISES SOLAR WORLD CONGRESS 2007: SOLAR ENERGY AND HUMAN SETTLEMENT, VOLS I-V | 2007年

关键词：

D O I：

暂无

中图分类号：

TU [建筑科学];

学科分类号：

0813 ;

摘要：

Influence of substrate temperature and vacuum annealing on the structural properties of CdTe(111)/Si(100) thin film grown by hot wall epitaxy are investigated by SEM and XRD in this paper. SEM revealed that the average grain size increased with the increase of substrate temperature in the range of 200 degrees C to 310 degrees C, and the (111) pyramids become more apparent and more regular after annealing. XRD patterns showed that the main features of all samples were almost same, and had a perfect cubic phase preferential (111) orientation, only the peak intensities increased with the increase of substrate temperature. Stronger (111) diffraction peak intensity after annealing were observed and clear 2 Theta peak shift,to higher position as well as a lower FWHM value could be detected, indicating that lattice constants matched better with the standard value and the dislocation density decreased as compared with the as-grown samples. All results showed that a better crystalline quality was achieved by vacuum annealing.

引用

页码：1089 / 1092

页数：4

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