Modelling a micro-cantilever vibrating in vacuum, gas or liquid under thermal base excitation

被引：8
|
作者：
Komeili, Mojtaba [1 ]
Menon, Carlo [1 ]
机构：
[1] Simon Fraser Univ, Sch Engn Sci, MENRVA Res Grp, Metro Vancouver, BC, Canada
来源：
MECHANICS RESEARCH COMMUNICATIONS | 2016年 / 73卷
基金：
加拿大健康研究院; 加拿大自然科学与工程研究理事会;
关键词：
Micro-electro-mechanical systems (MEMS); Micro-cantilever beam; Harmonic response; Thermal excitation; Fluid dynamics; LATERAL RESONANCES;
D O I：
10.1016/j.mechrescom.2016.01.009
中图分类号：
O3 [力学];
学科分类号：
08 ; 0801 ;
摘要：
The dynamic behaviour of a micro-cantilever that is transversely excited at its base is investigated in this paper. The base actuation is provided by thermal cycles via taking the advantage of thermal expansion. The Euler Bernoulli equation along with corresponding boundary conditions is used to model the continuous cantilever beam. The resultant boundary value problem takes into account the thermal expansion and stiffness of the actuator at the base as well as the effect of the surrounding gas or liquid. A closed-form analytical model is developed to compute natural frequencies, mode shapes, and harmonic response of the vibrating cantilever, in addition to an integral function for quality factor. The model is validated via a finite element (FE) analysis using ANSYS commercial package. This validation shows that the proposed model can properly predict the cantilever's vibrating behaviour. (C) 2016 Elsevier Ltd. All rights reserved.
引用
收藏
页码：39 / 46
页数：8
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