The effect of chlorine addition on ferromagnetic-enhanced inductively coupled plasma

被引：2
|
作者：
Fedoseev, Alexander [1 ]
Isupov, Mikhail [1 ]
Sukhinin, Gennadiy [1 ]
Pinaev, Vadim [1 ]
Demin, Nikon [1 ]
Salnikov, Mikhail [1 ]
机构：
[1] RAS, SB, Inst Thermophys, Novosibirsk 630090, Russia
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS | 2020年 / 59卷
基金：
俄罗斯科学基金会;
关键词：
CONSISTENT GLOBAL-MODEL; RF PLASMA; DIAGNOSTICS; DISCHARGE; COLUMN; CL-2;
D O I：
10.7567/1347-4065/ab6568
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
A ferromagnetic-enhanced inductively coupled plasma source consisting of a narrow U-shaped gas discharge tube and a large chamber has been investigated. The effect of chlorine admixture with argon on the discharge properties was studied both experimentally and numerically. The discharge electric field strength and gas temperature were measured in chlorine concentrations of 0%-4% and discharge current densities of 0.2-1.5 A cm(-2). The appearance of discharge instabilities was noticed at current densities below 1 A cm(-2). A global model of Cl-2/Ar discharge was modified and used to describe basic features of plasma in the U-shaped tube. The plasma composition, energy balance terms and electric field strength values were calculated, and satisfactory agreement between the experimental and numerical data was found. A possible approach to decrease the U-shaped tube's power losses and the mechanism of the instabilities' formation are discussed. (C) 2020 The Japan Society of Applied Physics.
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页数：7
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