Prototype Instrument for Sheet Resistance Measurement by Pulse Voltage Excitation

被引：0
|
作者：
Saotome, Hideo [1 ]
Kaneko, Hiroaki [1 ]
机构：
[1] Chiba Univ, Grad Sch Engn, Chiba, Japan
来源：
2013 SEVENTH INTERNATIONAL CONFERENCE ON SENSING TECHNOLOGY (ICST) | 2013年
关键词：
sheet resistance; contactless measuremnt; pulse voltage excitation; magnetic induction; eddy current; CONTACTLESS MEASUREMENT;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel contactless method for measurement of the sheet resistance of a semiconductor wafer, that utilizes pulse voltage excitation, has been proposed by one of the authors. This novel method was applied and a prototype instrument was developed that can measure sheet resistance under 5 m Omega/sq, which is the same as the smallest value for the conventional contactless method.
引用
收藏
页码：569 / 572
页数：4
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