Polarization engineered InGaN/GaN visible-light photodiodes featuring high responsivity, bandpass response, and high speed

被引:23
|
作者
Lv, Zesheng [1 ]
Guo, Yao [1 ]
Zhang, Supeng [1 ]
Wen, Quan [1 ]
Jiang, Hao [1 ,2 ,3 ]
机构
[1] Sun Yat Sen Univ, Sch Elect & Informat Technol, Guangzhou, Guangdong, Peoples R China
[2] Sun Yat Sen Univ, State Key Lab Optoelect Mat & Technol, Guangzhou, Guangdong, Peoples R China
[3] Sun Yat Sen Univ, Guangdong Engn Technol R&D Ctr Compound Semicond, Guangzhou, Guangdong, Peoples R China
基金
中国国家自然科学基金;
关键词
PIEZOELECTRIC POLARIZATION; WELL; PHOTODETECTOR; PERFORMANCE; DIFFUSION; TRANSPORT; GAN;
D O I
10.1039/d1tc01193f
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Optoelectronic devices, especially III-nitride quantum-structure devices, are suffering from a series of material problems, such as polarization induced quantum efficiency drop and the lack of a suitable p-type dopant. Herein, dopant-free polarization-induced doping by deposition of a linearly graded AlGaN was utilized to achieve the p-type layer. Benefiting from the polarization doping, p-down structure p-i-n photodiodes based on InGaN/GaN multiple quantum wells (MQWs), in which the polarization field in the InGaN QWs is aligned with the built-in electric field, were fabricated to promote the quantum efficiency. As a result, high responsivity, high speed, and bandpass response were realized via polarization engineering. The photodiodes exhibited a turn-on voltage of similar to 2.5 V and a very low dark current below 3.0 x 10(-13) A at 0 to -3 V. Bandpass responses of 420 to 365 nm were observed with a peak responsivity of 0.56 A W-1 at 395 nm, an EQE of 145%, and a light to dark current ratio of similar to 10(4) at 26 mu W cm(-2) illumination. In addition to the enhanced field in the QWs, the pure photoconductive gain originating from the polarization-induced energy band incline and carrier escape mechanism in the MQWs also contributes to the improved responsivity. The gain mechanism without involving trap states is supported by the high-speed response with a rising time of similar to 41 ns.
引用
收藏
页码:12273 / 12280
页数:8
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