共 32 条
- [1] Cheng J L, 2018, RES TECHNOLOGY HIGH
- [3] STEP HEIGHT MEASUREMENT USING 2-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY [J]. APPLIED OPTICS, 1987, 26 (14) : 2810 - 2816
- [6] EXTENDING THE UNAMBIGUOUS RANGE OF 2-COLOR INTERFEROMETERS [J]. APPLIED OPTICS, 1994, 33 (25) : 5948 - 5953
- [9] Multiwavelength interferometry: extended range metrology [J]. OPTICS LETTERS, 2009, 34 (07) : 950 - 952