Improved Least Common Multiple Effective Wavelength Method Used in Dual-Wavelength Interferometry

被引:0
|
作者
Guo Xiaoting [1 ]
Liu Xiaojun [1 ]
Lei Zili [1 ]
Yang Wenjun [1 ]
Xu Long [1 ]
机构
[1] Huazhong Univ Sci & Technol, Sch Mech Sci & Engn, Wuhan 430074, Hubei, Peoples R China
关键词
measurement; surface measurement; dual-wavelength interferometry; equivalent wavelength; least common multiple; unambiguous measurement range; 2-WAVELENGTH INTERFEROMETRY; EXTENDED RANGE; PHASE; MICROSCOPY;
D O I
10.3788/LOP202158.0712002
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
in the dual-wavelength interferometer, the traditional equivalent wavelength method only uses the difference information between two single wavelength wrapped phases, and ignores their size as well as positive and negative information. The effective wavelength method haled on the least common multiple directly uses the wrapped phase information of multiple single wavelengths, and thus not only it can achieve a larger unambiguous measurement range than the traditional equivalent wavelength method, but also it has no error amplification effect. However, the existing least common multiple effective wavelength phase unwrapping algorithm is mainly based on the look-up table method, which is slow and not suitable for a practical measurement. in this paper, a new algorithm proposed, which can greatly improve the calculation speed of the least common effective wavelength method, so that it earn he applied in dual-wavelength or multi-wavelength interferometers.
引用
收藏
页数:7
相关论文
共 32 条
  • [1] Cheng J L, 2018, RES TECHNOLOGY HIGH
  • [2] 2-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY
    CHENG, YY
    WYANT, JC
    [J]. APPLIED OPTICS, 1984, 23 (24) : 4539 - 4543
  • [3] STEP HEIGHT MEASUREMENT USING 2-WAVELENGTH PHASE-SHIFTING INTERFEROMETRY
    CREATH, K
    [J]. APPLIED OPTICS, 1987, 26 (14) : 2810 - 2816
  • [4] 2-COLOR LIGHT-EMITTING-DIODE SOURCE FOR HIGH-PRECISION PHASE-SHIFTING INTERFEROMETRY
    DECK, L
    DEMAREST, F
    [J]. OPTICS LETTERS, 1993, 18 (22) : 1899 - 1901
  • [5] SYNTHETIC WAVELENGTH STABILIZATION FOR 2-COLOR LASER-DIODE INTERFEROMETRY
    DEGROOT, P
    KISHNER, S
    [J]. APPLIED OPTICS, 1991, 30 (28) : 4026 - 4033
  • [6] EXTENDING THE UNAMBIGUOUS RANGE OF 2-COLOR INTERFEROMETERS
    DEGROOT, PJ
    [J]. APPLIED OPTICS, 1994, 33 (25) : 5948 - 5953
  • [7] Algebraic solution for phase unwrapping problems in multiwavelength interferometry
    Falaggis, Konstantinos
    Towers, David P.
    Towers, Catherine E.
    [J]. APPLIED OPTICS, 2014, 53 (17) : 3737 - 3747
  • [8] Method of excess fractions with application to absolute distance metrology: analytical solution
    Falaggis, Konstantinos
    Towers, David P.
    Towers, Catherine E.
    [J]. APPLIED OPTICS, 2013, 52 (23) : 5758 - 5765
  • [9] Multiwavelength interferometry: extended range metrology
    Falaggis, Konstantinos
    Towers, David P.
    Towers, Catherine E.
    [J]. OPTICS LETTERS, 2009, 34 (07) : 950 - 952
  • [10] Unambiguous measurement range and error tolerance in dual-wavelength interferometry
    Guo, Xiaoting
    Liu, Xiaojun
    Lei, Zili
    Chen, Cheng
    Yang, Wenjun
    [J]. APPLIED OPTICS, 2020, 59 (29) : 9272 - 9278