Present Status and Prospect of Graphene Interconnect Applications

Graphene has been expected as an alternative material for copper interconnects in which resistance increases and reliability deterio-rates in nanoscale. While the principle advantages are verified by simu-lations and experiments, they have not been put into practical use due to the immaturity of the manufacturing process leading to mass production. On the other hand, recent steady progress in the fabrication process has in-creased the possibility of practical application. In this paper, I will review the recent advances and the latest prospects for conductor applications of graphene centered on interconnects. The possibility of further application utilizing the unique characteristics of graphene is discussed.