Experimental and Numerical Optimization of Beam Shapes for Short-Pulse Ultraviolet Laser Cutting Processing

被引：11
|
作者：
Sotnikov, Anatoly [1 ]
Laux, Harald [1 ]
Stritzker, Bernd [2 ]
机构：
[1] OSRAM Opto Semicond GmbH, Leibnizstr 4, D-93055 Regensburg, Germany
[2] Univ Augsburg, Inst Phys, D-86159 Augsburg, Germany
来源：
LASER ASSISTED NET SHAPE ENGINEERING 6, PROCEEDINGS OF THE LANE 2010, PART 1 | 2010年 / 5卷
关键词：
process optimization; laser-based cutting of silicon; laser cutting simulation;
D O I：
10.1016/j.phpro.2010.08.130
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In this work the effect of elliptical beam shapes on cutting performance of silicon is studied experimentally using a Diode Pumped Solid State Q-switched UV laser operating at the wavelength of 355 nm. Elliptical beams are investigated by varying scanning speed, repetition rate and average output power. It is shown that a short elliptical beam with 6 x 230 mu m dimension forms a deeper groove at higher cutting speed and lower average output power compared to a longer elliptical beam. A numerical model of the laser cutting process is also described. Some validation results for single and multi-pulse cutting are shown. (C) 2010 Published by Elsevier B.V.
引用
收藏
页码：137 / 146
页数：10
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