Fast Analytical Design of Poly-SiGe MEMS Pressure Sensors

被引：0
|
作者：
Rochus, V. [1 ]
Wang, B. [1 ]
Chaudhuri, A. Ray [1 ]
Helin, P. [1 ]
Severi, S. [1 ]
Rottenberg, X. [1 ]
机构：
[1] IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium
来源：
2015 16TH INTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (EUROSIME) | 2015年
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents a fast design strategy for Poly-SiGe MEMS pressure sensors, based on circular Kirchhoff-Love plate theory. The underlying analytical model allows for a rapid and accurate evaluation of the sensitivity of the sensors, crucial for improving their design. The accuracy of the new model is demonstrated by comparing its predictions with more computationally expensive simulation techniques (high-order parametric element and three-dimensional fmite element models) and with experimental measurements performed on a 300 mu m membrane fabricated using the Poly-SiGe platform developed at imec.
引用
收藏
页数：4
相关论文
共 50 条
  • [21] Outgassing study of thin films used for poly-SiGe based vacuum packaging of MEMS
    Wang, B.
    Tanaka, S.
    Guo, B.
    Vereecke, G.
    Severi, S.
    Witvrouw, A.
    Wevers, M.
    De Wolf, I.
    MICROELECTRONICS RELIABILITY, 2011, 51 (9-11) : 1878 - 1881
  • [22] Outgassing Study of Thin Films Used for poly-SiGe Based Vacuum Packaging of MEMS
    Wang, B.
    Tanaka, S.
    Guo, B.
    Vereecke, G.
    Severi, S.
    Witvrouw, A.
    Wevers, M.
    De Wolf, I.
    2012 19TH IEEE INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA), 2012,
  • [23] Laser crystallisation of poly-SiGe for microbolometers
    Chiussi, S
    Serra, C
    Serra, J
    González, P
    León, B
    Urban, S
    Andrä, G
    Bergmann, J
    Falk, F
    Fabbri, F
    Fornarini, L
    Martelli, S
    Rinaldi, F
    APPLIED SURFACE SCIENCE, 2002, 186 (1-4) : 166 - 172
  • [24] Design and characterization of a CMOS compatible poly-SiGe lowg capacitive accelerometer
    Wen, L.
    Haspeslagh, L.
    De Coster, J.
    Witvrouw, A.
    Puers, R.
    EUROSENSORS XXIV CONFERENCE, 2010, 5 : 742 - 745
  • [25] SIGEM, low-temperature deposition of Poly-SiGe MEMs structures on standard CMOS circuits
    Ramos-Martos, J
    Ceballos-Cáceres, J
    Ragel-Morales, A
    Mora-Gutiérrez, JM
    Arias-Drake, A
    Lagos-Florido, MA
    Muñoz-Hinojosa, JM
    Mehta, A
    Verbist, A
    du Bois, B
    Kehr, K
    Leinenbach, C
    Van Aerde, S
    Spengler, J
    Witvrouw, A
    Smart Sensors, Actuators, and MEMS II, 2005, 5836 : 293 - 306
  • [26] Thermal stability of B in poly-SiGe on SiON
    Sadoh, T
    Fitrianto
    Kunigami, M
    Kenjo, A
    Miyauchi, A
    Inoue, H
    Miyao, A
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2002, 89 (1-3): : 129 - 132
  • [27] Evaluation of the Electrical Properties, Piezoresistivity and Noise of poly-SiGe for MEMS-above-CMOS applications
    Gonzalez, P.
    Lenci, S.
    Haspeslagh, L.
    De Meyer, K.
    Witvrouw, A.
    AMORPHOUS AND POLYCRYSTALLINE THIN FILM SILICON SCIENCE AND TECHNOLOGY - 2009, VOL 1153, 2009, 1153
  • [28] Aqueous transduction of poly-sige disk resonators
    Chandrahalim, Hengky
    Bhave, Sunil A.
    Quevy, Emmanuel P.
    Howe, Roger T.
    TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2007,
  • [29] SU-8 thermo-compressive packaging for post-CMOS poly-SiGe MEMS
    Wen, Lianggong
    Wouters, Kristof
    Puers, Robert
    PROCEEDINGS OF THE EUROSENSORS XXIII CONFERENCE, 2009, 1 (01): : 1539 - 1542
  • [30] A 2D MEMS grating based CMOS compatible poly-SiGe variable optical attenuator
    Rudra, S.
    Van Hoof, R.
    De Coster, J.
    Bryce, G.
    Severi, S.
    Witvrouw, A.
    Van Thourhout, D.
    MICROELECTRONIC ENGINEERING, 2013, 105 : 8 - 12
12345