Kinetic simulation model of magnetron discharges

被引：27
|
作者：
Porokhova, IA
Golubovskii, YB
Bretagne, J
Tichy, M
Behnke, JF
机构：
[1] Ernst Moritz Arndt Univ Greifswald, D-17487 Greifswald, Germany
[2] St Petersburg State Univ, St Petersburg 198904, Russia
[3] Univ Paris 11, Phys Gaz & Plasmas Lab, F-91405 Orsay, France
[4] Charles Univ Prague, CR-18000 Prague, Czech Republic
来源：
PHYSICAL REVIEW E | 2001年 / 63卷 / 05期
关键词：
D O I：
10.1103/PhysRevE.63.056408
中图分类号：
O35 [流体力学]; O53 [等离子体物理学];
学科分类号：
070204 ; 080103 ; 080704 ;
摘要：
A self-consistent kinetic model of plasma in the entire gap of a magnetron cylindrical discharge, with all quantities varying in radius and with the uniform magnetic field being directed axially. is presented. The discharge modeling is performed on the basis of a numerical solution of the spatially inhomogeneous Boltzmann kinetic equation together with equations of ion motion, current balance, and Poisson's equation. The model represents an example of discharge description from cathode to anode with respect to strong nonlocality effects in the distribution function formation. Based on the results for a typical magnetron discharge condition, the distribution functions, field, and macroscopic properties calculated for the entire discharge in argon, are presented and discussed.
引用
收藏
页码：564081 / 564089
页数：9
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