Improvement in the quality of LiCaAlF6 single crystal as window material

被引:19
|
作者
Sato, H
Bensalah, A
Yoshikawa, A
Nikl, M
Machida, H
Fukuda, T
机构
[1] Tohoku Univ, Inst Multidisciplinary Res Adv mat, Aoba Ku, Sendai, Miyagi 9808577, Japan
[2] NEC Corp Ltd, TOKIN, Tsukuba, Ibaraki 3050875, Japan
[3] ASCR, Inst Phys, Prague 16253, Czech Republic
关键词
Czochralski method; LiCaAlF6; optical material; annealing; doping; induced absorption;
D O I
10.1016/S0925-3467(03)00115-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Three-in. size LiCaAlF6 (LiCAF) single crystals were successfully grown by the Czoehralski method. Both measurements of the transmission spectra in the VUV regions and the X-ray rocking curve analysis showed that the crystallinity of LiCAF single crystal was improved by the annealing. Optical absorption measurements in the UV/VIS spectral regions following X-ray irradiation were performed in order to compare the radiation damage with a lithography-grade CaF2 crystal. (C) 2003 Elsevier B.V. All rights reserved.
引用
收藏
页码:123 / 127
页数:5
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