Fabrication of single crystal diamond microchannels for microelectromechanical systems

被引：9

作者：

Fu, J. ^{[1
]}

Zhu, T. F. ^{[1
]}

Zhang, M. H. ^{[1
]}

Zhang, X. ^{[1
]}

Li, F. N. ^{[1
]}

Liu, Z. C. ^{[1
]}

Denu, G. A. ^{[1
]}

Wang, Y. F. ^{[1
]}

Zhao, D. ^{[1
]}

Shao, G. Q. ^{[1
]}

Chang, X. H. ^{[1
]}

Wang, W. ^{[1
]}

Zhang, J. W. ^{[1
]}

Wang, H. X. ^{[1
]}

Wang, J. J. ^{[2
]}

Hou, X. ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Inst Wide Band Gap Semicond, Xian, Shaanxi, Peoples R China

[2] Hebei Semicond Res Inst, Natl Key Lab ASIC, Shijiazhuang, Hebei, Peoples R China

来源：

关键词：

Single crystal diamond; Microchannel; MEMS; DEVICES;

D O I：

10.1016/j.diamond.2017.09.016

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fabrication of single crystal diamond microchannels on HPHT diamond substrate has been carried out successfully. Firstly, tungsten film was patterned on diamond substrate surface by conventional photolithography and magnetron sputtering methods. Secondly, single crystal diamond epitaxial layer was grown on the surface of the patterned substrate by microwave plasma chemical vapor deposition system. Then the tungsten film was etched out by acid to form microchannel. Finally, different color liquid was introduced to check the hollow of microchannels. The morphology of the microchannels has been investigated by optical microscope, scanning electron microscope and atomic force microscope. The crystallinity was evaluated by X-ray diffraction systems and Raman spectroscope technology.

引用

页码：64 / 68

页数：5

共 50 条

[21] Design and fabrication of a microelectromechanical systems polymeric micropump
Luo, Yi
Yin, Xianglong
Wang, Xiaodong
PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART N-JOURNAL OF NANOMATERIALS NANOENGINEERING AND NANOSYSTEMS, 2014, 228 (02) : 98 - 103
[22] Composite ferromagnetic photoresist for the fabrication of microelectromechanical systems
Damean, N
Parviz, BA
Lee, JN
Odom, T
Whitesides, GM
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (01) : 29 - 34
[23] Monolithic three-dimensional single-crystal silicon microelectromechanical systems
Hofmann, W
Lee, CS
MacDonald, NC
SENSORS AND MATERIALS, 1998, 10 (06) : 337 - 350
[24] Direct integration of solid state stress sensors with single crystal microelectromechanical systems
Haronian, D
ELECTRONICS LETTERS, 1998, 34 (22) : 2171 - 2173
[25] Microelectromechanical systems (MEMS): fabrication, design and applications
Judy, JW
SMART MATERIALS AND STRUCTURES, 2001, 10 (06) : 1115 - 1134
[26] Optomechanical Nanostructures via Scalable Fabrication in Single-Crystal Diamond
Hryciw, Aaron C.
Khanaliloo, Behzad
Jayakumar, Harishankar
Healey, Chris J.
Barclay, Paul E.
2014 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2014,
[27] Advanced Fabrication of Single-Crystal Diamond Membranes for Quantum Technologies
Challier, Michel
Sonusen, Selda
Barfuss, Arne
Rohner, Dominik
Riedel, Daniel
Koelbl, Johannes
Ganzhorn, Marc
Appel, Patrick
Maletinsky, Patrick
Neu, Elke
MICROMACHINES, 2018, 9 (04):
[28] Fabrication and performance of single crystal diamond neutron and gamma ray detectors
Liu, Jiawei
Chang, Jiafeng
Zhong, Guoqiang
Zhang, Jizong
Pang, Xiankai
Jia, Junji
AIP ADVANCES, 2019, 9 (09)
[29] Fabrication of silicon carbide microchannels by thin diamond wheel grinding
Yanlin Xie
Daxiang Deng
Guang Pi
Xiang Huang
Chenyang Zhao
The International Journal of Advanced Manufacturing Technology, 2020, 111 : 309 - 323
[30] Fabrication of silicon carbide microchannels by thin diamond wheel grinding
Xie, Yanlin
Deng, Daxiang
Pi, Guang
Huang, Xiang
Zhao, Chenyang
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY, 2020, 111 (1-2): : 309 - 323

← 1 2 3 4 5 →