TOWARDS NANOSCALE 3D PRINTING OF PDMS-LIKE POLYMERS

被引：0
|
作者：
Han, Anpan [1 ]
Zhao, Ding [2 ]
Liu, Liyun [3 ]
Skov, Anne Ladegaard [3 ]
机构：
[1] Tech Univ Denmark, Dept Mech Engn, Lyngby, Denmark
[2] Tech Univ Denmark, Nanolab, Lyngby, Denmark
[3] Tech Univ Denmark, Dept Chem Engn, Lyngby, Denmark
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
关键词：
Organic ice; electron beam; PDMS; 3D printing; siloxanes; additive manufacturing;
D O I：
10.1109/transducers.2019.8808628
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Inside a vacuum chamber, we froze hexamethyldisiloxane vapors into thin-films of ice. We then patterned and crossed-linked the ice-film into silicon containing polymers by electron beam exposure. The unreacted hexamethyldisiloxane is vaporized at room temperature, and the cross-linked siloxane remains as a stable thin-film on the supporting silicon substrate. The chemical composition of the cross-linked siloxane is similar to polydimethylsiloxane (PDMS) elastomer, which is used in many transducers and sensors applications.
引用
收藏
页码：1724 / 1727
页数：4
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