共 50 条
- [32] STUDIES OF THIN-FILM GROWTH, ADSORPTION, AND OXIDATION BY IN-SITU, REAL-TIME, AND EX-SITU ION-BEAM ANALYSIS JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1994, 12 (04): : 1557 - 1564
- [33] Real-time, in situ film thickness metrology in a 10 Torr W chemical vapor deposition process using an acoustic sensor JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2003, 21 (03): : 1055 - 1063
- [37] New algorithm for real-time thin film thickness estimation given in situ multiwavelength ellipsometry using an extended Kalman filter Thin Solid Films, 1998, 313-314 (1-2): : 156 - 160
- [40] Single-Shot Real-Time Observation of Ultrafast Amorphization in Ge2Sb2Te5 Thin Film ULTRAFAST PHENOMENA XIX, 2015, 162 : 352 - 355