Vertically Aligned Carbon Nanotubes for Microelectrode Arrays Applications

被引：15

作者：

Castro Smirnov, J. R. ^{[1
]}

Jover, Eric ^{[1
]}

Amade, Roger ^{[1
]}

Gabriel, Gemma ^{[2
,3
]}

Villa, Rosa ^{[2
,3
]}

Bertran, Enric ^{[1
]}

机构：

[1] Univ Barcelona, IN2UB, Dept Appl Phys & Opt, FEMAN Grp, E-08028 Barcelona, Spain

[2] Inst Microelect Barcelona IMB CNM CSIC, Bellaterra 08193, Spain

[3] CIBER BBN, Networking Ctr Bioengn Biomat & Nanomed, Madrid, Spain

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2012年 / 12卷 / 09期

关键词：

Nanostructured Materials; Carbon Nanotubes (CNTs); Vertically Aligned Carbon Nanotubes (VACNTs); Plasma Enhanced Chemical Vapour Deposition (PECVD); Micro-Electrode Arrays (MEAS); CHEMICAL-VAPOR-DEPOSITION; SELECTIVE GROWTH; FABRICATION; ELECTRODES;

D O I：

10.1166/jnn.2012.5867

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

In this work a methodology to fabricate carbon nanotube based electrodes using plasma enhanced chemical vapour deposition has been explored and defined. The final integrated microelectrode based devices should present specific properties that make them suitable for microelectrode arrays applications. The methodology studied has been focused on the preparation of highly regular and dense vertically aligned carbon nanotube (VACNT) mat compatible with the standard lithography used for microelectrode arrays technology.

引用

页码：6941 / 6947

页数：7

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