Long-term stability and oxide stress influence on capacitive pressure sensors fabricated with wafer bonding

被引：0

作者：

Goustouridis, D ^{[1
]}

Normand, P ^{[1
]}

Tsoukalas, D ^{[1
]}

机构：

[1] NCSR Demokritos, Inst Microelect, Aghia Paraskevi 15310, Greece

来源：

EUROSENSORS XII, VOLS 1 AND 2 | 1998年

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this work we present detailed characterization results on silicon capacitive pressure sensing elements. The device fabrication technology is based on wafer bonding and includes critical variations from the previously proposed process by the same authors resulting in much higher device response uniformity. Emphasis it is given here on drift as well as on fatigue measurements since these effects determine the long-term reliability of the devices.

引用

页码：31 / 34

页数：4

共 50 条

[21] The long-term stability of miniaturized electrochemical sensors for measurements on the environment
Oelssner, W
Herrmann, S
Schwarz, J
Kaden, H
CHEMIE INGENIEUR TECHNIK, 2000, 72 (1-2) : 98 - 101
[22] The Influence of Operation Pressure on the Long-Term Stability of Salt-Cavern Gas Storage
Liu, Jianjun
Xiao, Qiang
ADVANCES IN MECHANICAL ENGINEERING, 2014,
[23] INFLUENCE OF SURFACE PREPARATION ON LONG-TERM BONDING OF SHOTCRETE - DISCUSSION
WARNER, J
ACI MATERIALS JOURNAL, 1995, 92 (05) : 569 - 570
[24] Research of Long-Term Stability of High-Sensitivity Piezoresistive Pressure Sensors for Ultralow Differential Pressures
Basov, Mikhail
IEEE SENSORS JOURNAL, 2024, 24 (22) : 36443 - 36450
[25] Long-term Stability Analysis for Atmospheric Pressure Standard
He Xiaolei
Li Jianying
Sha Yizhou
Li Wei
7TH INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION AND CONTROL TECHNOLOGY: MEASUREMENT THEORY AND SYSTEMS AND AERONAUTICAL EQUIPMENT, 2008, 7128
[26] THE IMPORTANCE OF PRESSURE STABILITY FOR THE LONG-TERM USE OF MEMBRANES
BUSCHATZ, H
EISOLD, C
SCHWARZ, HH
CHEMISCHE TECHNIK, 1983, 35 (10): : 545 - 545
[27] Recent Advances in Stretchable and Wearable Capacitive Electrophysiological Sensors for Long-Term Health Monitoring
Ullah, Hadaate
Wahab, Md A.
Will, Geoffrey
Karim, Mohammad R.
Pan, Taisong
Gao, Min
Lai, Dakun
Lin, Yuan
Miraz, Mahdi H.
BIOSENSORS-BASEL, 2022, 12 (08):
[28] Long-term stability of depression, anxiety, and stress syndromes
Lovibond, PF
JOURNAL OF ABNORMAL PSYCHOLOGY, 1998, 107 (03) : 520 - 526
[29] Ultra-high long-term stability of oxide-TTFTs under current stress
Riedl, T.
Goerrn, P.
Hoelzer, P.
Kowalsky, W.
PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2007, 1 (05): : 175 - 177
[30] LONG-TERM STABILITY OF BLOOD-PRESSURE AND PRESSOR REACTIVITY TO MENTAL STRESS IN BORDERLINE HYPERTENSION
JERN, S
WALL, U
BERGBRANT, A
AMERICAN JOURNAL OF HYPERTENSION, 1995, 8 (01) : 20 - 28

← 1 2 3 4 5 →