Laser induced fluorocarbon coating onto fused silica optics

被引：0
|
作者：
Funatsu, T
Murahara, MM
Okamoto, T
机构：
[1] Tokai Univ, Dept Elect Engn, Hiratsuka, Kanagawa 2591292, Japan
[2] Okamoto Opt Work Inc, Isogo Ku, Yokohama, Kanagawa 2350008, Japan
来源：
Laser-Induced Damage In Optical Materials: 2004 | 2005年 / 5647卷
关键词：
fluorocarbon; fused silica optics; silicon oil; excimer-lamp; coarting;
D O I：
10.1117/12.588387
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：232 / 232
页数：1
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