Uncooled focal plane array detector development at InfraredVision Technology Corporation

被引:3
|
作者
Hay, KA [1 ]
Van Deusen, D [1 ]
机构
[1] Infrared Vis Technol Corp, Buellton, CA 93427 USA
关键词
UFPA; uncooled; microbolometer; VOx; vanadium oxide; NonUniformity Correction (NUC); RESOLUTION; FPAS;
D O I
10.1117/12.604218
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
InfraredVision Technology Corporation ("ITC") has improved the performance of the 320x240 microbolometer Uncooled Focal Plane Array ("UFPA") by increasing the pixel fill-factor. This allows state-of-the-art performance for applications requiring high sensitivity. Measurements taken on microbolometer test structures and detector arrays show a factor of two improvements in the responsivity over that previously reported for our standard 37.5-mu m pixel UFPA. Performance results for microbolometer pixels ranging in size from 50 mu m down to 15 mu m are presented. Our ITC-1000 series detector product addresses both imaging and radiometric commercial-camera applications. With the development of a high fill-factor pixel design, ITC will soon provide a high-performance VOx microbolometer-based sensor to camera manufacturers requiring state-of-the-art detector performance. FPA performance is presented to demonstrate the sensor improvements accomplished. The use of our on-chip NonUniformity Correction (NUC) feature, available on the ITC-1000 detector, is characterized to demonstrate the performance limitations.
引用
收藏
页码:514 / 523
页数:10
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