An accurate inner diameter measurement

被引：5

作者：

Mahammad, Sanjid Arif ^{[1
]}

Chaudhary, K. P. ^{[2
]}

Yadav, Sanjay ^{[3
]}

Sen, Mrinal ^{[4
]}

Ghoshal, Sanjoy K. ^{[5
]}

机构：

[1] Natl Phys Lab, CSIR, Length Dimens & Nanometrol, New Delhi 110012, India

[2] Maharaja Surajmal Inst Technol, Dept Elect & Commun Engn, New Delhi 110058, India

[3] Natl Phys Lab, CSIR, Pressure Vacuum & Ultrason Metrol, New Delhi 110012, India

[4] Indian Sch Mines, Indian Inst Technol, Dept Elect Engn, Dhanbad 826004, Jharkhand, India

[5] Indian Sch Mines, Indian Inst Technol, Dept Mech Engn, Dhanbad 826004, Jharkhand, India

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2020年 / 91卷 / 06期

关键词：

MEASUREMENT UNCERTAINTY; COMPARATOR; DESIGN; MODEL; FORM;

D O I：

10.1063/1.5135359

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The inaccurate deflection behavior of the probing system degrades the performance of the diameter-measuring machines. In this experiment, the probing is improved, applying an autocollimator and an angular positioning datum. We have devised this datum using a liquid wedge. A ring gauge is chosen as a workpiece to evaluate the deflection behavior of the probing system. The improved uncertainty of the probing is found as low as 40 nm. Subsequently, the inner diameter of the ring gauge is measured on this experimental setup. By employing a simulation, we aligned the workpiece. The deflections of the stylus are optimized to achieve zero deflection error at the zenith points. Consequently, the swing of the probe at the zenith points is combined with the rectilinear displacement of the workpiece to estimate the inner diameter. The uncertainty of the measurement of the ring gauge is improved up to 140 nm.

引用

页数：8

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