An Ultralow-Ripple Polarization Voltage Generator based on High-Voltage Bandgap Reference for MEMS Gyroscopes

被引:0
|
作者
Chen, Hua [1 ]
Meng, Zhen [1 ]
Zhang, Xingcheng [1 ]
Liu, Ke [1 ]
机构
[1] Chinese Acad Sci, Smart Sensing Ctr, Inst Microelect, 3 Beitucheng West Rd, Beijing 100029, Peoples R China
关键词
Charge pump; low ripple; bandgap; DC bias; MEMS gyroscope;
D O I
10.1109/NEMS51815.2021.9451416
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This paper proposes an ultralow-ripple direct-current (DC) bias voltage generator for the polarization requirement of high-performance MEMS gyroscopes. The generator is based on a high-voltage (HV) bandgap reference whose power supply is provided by an integrated Dickson-type DC-DC converter. The DC-DC converter can output a 25 V source with a 4100 mu A load current. In addition, an HV buffer is connected behind the HV bandgap reference for isolation ami better driving. With a 10 pF load capacitance exhibited by the MEMS gyroscope, the post-simulated output voltage of the generator is 20 V with a ripple of 5 mV(p-p) and a settling time of 13.5 mu s. If the load capacitance is increased to 50 pF, the ripple is reduced to 1 mV(p-p) with a settling time of 16.7 mu s.
引用
收藏
页码:197 / 200
页数:4
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