Cryogenic performance of micromachined silicon rocking actuator for tuning a superconducting resonator

被引：2
|
作者：
Wang, Y. [1 ]
Prest, M. J. [2 ]
Lancaster, M. J. [1 ]
机构：
[1] Univ Birmingham, Sch Elect Elect & Comp Engn, Birmingham B15 2TT, W Midlands, England
[2] Univ Warwick, Dept Phys, Coventry CV4 7AL, W Midlands, England
来源：
ELECTRONICS LETTERS | 2010年 / 46卷 / 23期
关键词：
FILTERS;
D O I：
10.1049/el.2010.8454
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A micromachined silicon rocking actuator is used to tune a high temperature superconducting resonator. Its performance at cryogenic temperatures from 77 to 30 K is studied. A significant increase in the quality factor of the resonator, from 376 to 13876, is observed. It is confirmed that the change in resistance of the silicon tuning probe with temperature is the main factor responsible for the improvement. At low temperature, the silicon becomes an excellent dielectric, which makes it a good material for low-loss tuners.
引用
收藏
页码：1569 / 1570
页数：2
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