A novel optical fibers MEMS pressure sensor

被引：1
|
作者：
Ni Xiao-qi [1 ]
Wang Ming [1 ]
Chen Xu-xing [1 ]
Ge Yi-xian [1 ]
Rong Hua [1 ]
机构：
[1] Nanjing Normal Univ, Jiangsu Key Lab Optoelect Technol, Sch Phys Sci & Technol, Nanjing 210097, Peoples R China
来源：
INTERNATIONAL MEMS CONFERENCE 2006 | 2006年 / 34卷
关键词：
D O I：
10.1088/1742-6596/34/1/165
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
A novel pressure sensor based on the Fabry-Perot interferometry and micro-electromechanical system (MEMS) technology is proposed and demonstrated. Light is coupled into the sensor through a fiber. Dual-wavelength demodulation method is used to analyze the reflected optical signals and compensate the errors independent of optical wavelength. Theoretical analysis and simulation results are presented. Experimental results for pressure measurements ranging from 0 Mpa to 3 Mpa demonstrate reasonable linearity and sensitivity.
引用
收藏
页码：996 / 1001
页数：6
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